NEMS by Sidewall Transfer Lithography
نویسندگان
چکیده
منابع مشابه
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Sidewall transfer lithography (STL) is demonstrated as a method for parallel fabrication of 2D nanostructured cellular solids in single-crystal silicon. The linear mechanical properties of four lattices (perfect and defected diamond; singly and doubly periodic honeycomb) with low effective Young’s moduli and effective Poisson’s ratio ranging from positive to negative are modelled using analytic...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2014
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2014.2313462